SEM/FE-SEM/Nano-probing

We distribute a wide range of Hitachi SEMs, from the conventional ones that use a thermoionic electron source to the high-performance field emission (FE-SEM) models, passing through the tabletop SEMs, portable, easy-to-use and designed for an immediate experience in the micrometric world. We also offer Nano-probing systems, special SEMs dedicated to EBAC analysis.

SEM (Scanning Electron Microscopes)
Conventional SEM employs thermionic electron source (tungsten filament) and can accommodate relatively large sample. Using low vacuum mode, non-conductive sample, outgassing sample, and sample containing a little water or oil can be observed without metal coating. Broad-ranging lineup from compact type to large chamber model is available based on sample size and application.

A Tabletop SEM offers an immediate micro world experience for everyone with the convenience of light microscope, without renouncing to features like EDX chemical analysis. With low vacuum imaging capability, even non-conductive samples can be promptly observed without metal coating.

TM4000
The TM4000 Series features innovation and cutting-edge technologies which redefine the capabilities of a tabletop microscope. This new generation of the long-standing Hitachi High Technologies tabletop microscopes (TM) integrates ease of use, optimized imaging, and high-image quality, while maintaining the compact design of the well-established Hitachi High Technologies TM Series products.

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The FlexSEM 1000 II combines innovative technological features with an intuitive interface, to deliver adaptability and flexibility in a powerful, automated, lab-friendly package. Cutting-edge technology and circuitry provides unrivaled imaging performance, even in variable-pressure environments, a feature previously only available in a full-sized SEM. This SEM runs on clean energy for an economical analytical tool, without compromising performance.

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With the adoption of high brightness field emission (FE) electron source, FE-SEM can more highly focus electron beam than conventional SEM employing thermionic electron source, and hence can obtain higher resolution. It also provides rather clear images even at low accelerating voltage to allow observation of microstructure on sample surface. Various combinations of electron source and lens type are available based on sample and application.

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Nano-probing systems are SEM-based probing systems optimized for electrical characterization and Electron Beam Absorbed Current (EBAC) analysis of semiconductor devices. High resolution SEM with high-brightness FE electron source enables intuitive operation and precise control of the probes.

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